S.V. Sreenivasan
TítuloCitado porAño
Step and flash imprint lithography: a new approach to high-resolution patterning
M Colburn, SC Johnson, MD Stewart, S Damle, TC Bailey, B Choi, ...
Emerging Lithographic Technologies III 3676, 379-389, 1999
9271999
Step and flash imprint lithography: Template surface treatment and defect analysis
T Bailey, BJ Choi, M Colburn, M Meissl, S Shaya, JG Ekerdt, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
4872000
Step and repeat imprint lithography processes
SV Sreenivasan, BJ Choi, NE Schumaker, RD Voisin, MPC Watts, ...
US Patent 7,077,992, 2006
4102006
Template for room temperature, low pressure micro-and nano-imprint lithography
T Bailey, BJ Choi, M Colburn, SV Sreenivasan, CG Willson, J Ekerdt
US Patent 6,696,220, 2004
4022004
Formation of discontinuous films during an imprint lithography process
BJ Choi, MJ Meissl, SV Sreenivasan, MPC Watts
US Patent 6,932,934, 2005
3492005
Step and repeat imprint lithography systems
SV Sreenivasan, MPC Watts, BJ Choi, MJ Meissl, NE Schumaker, ...
US Patent 6,900,881, 2005
2802005
Formation of discontinuous films during an imprint lithography process
BJ Choi, MJ Meissl, SV Sreenivasan, MPC Watts
US Patent 6,932,934, 2005
2702005
Method for imprint lithography using an electric field
SV Sreenivasan, RT Bonnecaze, CG Willson
US Patent 6,908,861, 2005
2482005
Mammalian cells preferentially internalize hydrogel nanodiscs over nanorods and use shape-specific uptake mechanisms
R Agarwal, V Singh, P Jurney, L Shi, SV Sreenivasan, K Roy
Proceedings of the National Academy of Sciences 110 (43), 17247-17252, 2013
2382013
Alignment systems for imprint lithography
SV Sreenivasan, MPC Watts, BJ Choi, RD Voisin, NE Schumaker
US Patent 7,070,405, 2006
2362006
Alignment methods for imprint lithography
SV Sreenivasan, MPC Watts, BJ Choi, RD Voisin
US Patent 6,916,584, 2005
2362005
Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography
P Ruchhoeft, M Colburn, B Choi, H Nounu, S Johnson, T Bailey, S Damle, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999
1971999
High precision orientation alignment and gap control stages for imprint lithography processes
BJ Choi, SV Sreenivasan, SC Johnson
US Patent 6,873,087, 2005
1702005
Design of orientation stages for step and flash imprint lithography
BJ Choi, SV Sreenivasan, S Johnson, M Colburn, CG Wilson
Precision Engineering 25 (3), 192-199, 2001
1682001
Step & flash imprint lithography
DJ Resnick, SV Sreenivasan, CG Willson
Materials today 8 (2), 34-42, 2005
1632005
In vivo ruminant health sensor
D Kuhn, D Kohn
US Patent App. 10/336,062, 2004
1592004
High-resolution overlay alignment methods for imprint lithography
SV Sreenivasan, BJ Choi, M Colburn, T Bailey
US Patent 6,921,615, 2005
1582005
Step and flash imprint lithography for sub-100-nm patterning
M Colburn, A Grot, MN Amistoso, BJ Choi, TC Bailey, JG Ekerdt, ...
Emerging Lithographic Technologies IV 3997, 453-457, 2000
1562000
Imprint lithography for integrated circuit fabrication
DJ Resnick, WJ Dauksher, D Mancini, KJ Nordquist, TC Bailey, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1552003
Method to arrange features on a substrate to replicate features having minimal dimensional variability
SV Sreenivasan, MPC Watts
US Patent 8,349,241, 2013
1472013
El sistema no puede realizar la operación en estos momentos. Inténtalo de nuevo más tarde.
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