| Prototype ATLAS IBL modules using the FE-I4A front-end readout chip Atlas Ibl Collaboration Journal of Instrumentation 7 (11), P11010, 2012 | 166 | 2012 |
| Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002 | 108 | 2002 |
| Stress characterization of electroplated gold layers for low temperature surface micromachining B Margesin, A Bagolini, V Guarnieri, F Giacomozzi, A Faes, R Pal, ... Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 …, 2003 | 63 | 2003 |
| Development of double-sided full-passing-column 3D sensors at FBK G Giacomini, A Bagolini, M Boscardin, GF Dalla Betta, F Mattedi, M Povoli, ... IEEE Transactions on Nuclear Science 60 (3), 2357-2366, 2013 | 56 | 2013 |
| Slim edges in double-sided silicon 3D detectors M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ... Journal of Instrumentation 7 (01), C01015, 2012 | 55 | 2012 |
| Rib waveguides for mid-infrared silicon photonics MM Milošević, PS Matavulj, PY Yang, A Bagolini, GZ Mashanovich JOSA B 26 (9), 1760-1766, 2009 | 45 | 2009 |
| Fabrication of novel MEMS microgrippers by deep reactive ion etching with metal hard mask A Bagolini, S Ronchin, P Bellutti, M Chistè, M Verotti, NP Belfiore Journal of Microelectromechanical Systems 26 (4), 926-934, 2017 | 37 | 2017 |
| Development of micro-grippers for tissue and cell manipulation with direct morphological comparison R Cecchi, M Verotti, R Capata, A Dochshanov, G Broggiato, R Crescenzi, ... Micromachines 6 (11), 1710-1728, 2015 | 36 | 2015 |
| Stress and resistivity analysis of electrodeposited gold films for MEMS application S Kal, A Bagolini, B Margesin, M Zen Microelectronics journal 37 (11), 1329-1334, 2006 | 35 | 2006 |
| PECVD low stress silicon nitride analysis and optimization for the fabrication of CMUT devices A Bagolini, AS Savoia, A Picciotto, M Boscardin, P Bellutti, N Lamberti, ... Journal of Micromechanics and Microengineering 25 (1), 015012, 2014 | 31 | 2014 |
| ⟨ 1 0 0⟩ bar corner compensation for CMOS compatible anisotropic TMAH etching R Mukhiya, A Bagolini, B Margesin, M Zen, S Kal Journal of micromechanics and microengineering 16 (11), 2458, 2006 | 31 | 2006 |
| Development of edgeless n-on-p planar pixel sensors for future ATLAS upgrades M Bomben, A Bagolini, M Boscardin, L Bosisio, G Calderini, J Chauveau, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2013 | 28 | 2013 |
| Development of planar detectors with active edge M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2011 | 26 | 2011 |
| Seismic velocity sensor with an internal sky-hook damping feedback loop P Gardonio, M Gavagni, A Bagolini IEEE Sensors Journal 8 (11), 1776-1784, 2008 | 26 | 2008 |
| Simulation and construction of a MEMS CSFH based microgripper NP Belfiore, G Broggiato, M Verotti, M Balucani, R Crescenzi, A Bagolini, ... Int. J. Mech. Control 16 (1), 21-30, 2015 | 24 | 2015 |
| New MEMS tweezers for the viscoelastic characterization of soft materials at the microscale P Di Giamberardino, A Bagolini, P Bellutti, I Rudas, M Verotti, F Botta, ... Micromachines 9 (1), 15, 2018 | 23 | 2018 |
| Development of modified 3D detectors at FBK GF Dalla Betta, A Bagolini, M Boscardin, L Bosisio, P Gabos, G Giacomini, ... IEEE Nuclear Science Symposuim & Medical Imaging Conference, 382-387, 2010 | 23 | 2010 |
| Wideband mechanical response of a high-Q silicon double-paddle oscillator A Borrielli, M Bonaldi, E Serra, A Bagolini, L Conti Journal of Micromechanics and Microengineering 21 (6), 065019, 2011 | 22 | 2011 |
| 3D-FBK pixel sensors: Recent beam tests results with irradiated devices A Micelli, K Helle, H Sandaker, B Stugu, M Barbero, F Hügging, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2011 | 21 | 2011 |
| Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism J Iannacci, A Repchankova, A Faes, A Tazzoli, G Meneghesso, ... Microelectronics Reliability 50 (9-11), 1599-1603, 2010 | 21 | 2010 |
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